Marta Šlapanská

Study of spokes and their properties in reactive high power impulse magnetron sputtering process

Školitel: Mgr. Jaroslav Hnilica, Ph.D.

Instituce: Masaryk University, Faculty of Science

Obor: Plasma Physics

 

O mém projektu

The project is focused on the fundamental research of ionization zones in reactive HiPIMS plasma, the so-called spokes. The reactive gas type and the flow or the material of the target will be systematically varied. Spokes will be studied by e. g. ICCD camera, unique strip probes and emissive probes. The influence of the presence of spokes on the HiPIMS deposition process, the deposition rate and the quality of the produced film will be studied.